Vacuum compatible linear motion device
US5784925A · kind A · utility
19Cited by
6References
42Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 13, 1996 |
| Grant date | Jul 28, 1998 |
| Priority date | — |
| Expiry date | Dec 13, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20354
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A vacuum compatible linear motion device having a fluid bearing is contained within a vacuum chamber having a working pressure of significantly less than one atmosphere. The fluid bearing is contained within a vacuum enclosure within the vacuum chamber and is maintained at a pressure higher than that of the vacuum chamber but less than one atmosphere, thus essentially isolating the fluid bearing. A moveable payload is coupled to the linear motion device such that linear motion in the direction of the long axis of the device is provided to the moveable payload.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.