Substrate housing and docking system
US5785186A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 11, 1994 |
| Grant date | Jul 28, 1998 |
| Priority date | — |
| Expiry date | Oct 11, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A modular, transportable for storing substrates, such as semi-conductor wafers and masks, and for maintaining such substrates in a substantially clean environment. Substrates are supported within the housing by a plurality of combs which maintain the substrates in spaced relationship relative to each other. Access to the interior of the housing is permitted by a pivotal door assembly. A docking unit permits interface of the housing with a clean environment. Control circuitry provided in the docking unit detects the presence of a housing and loads/unloads the housing as directed by a host computer through a communication link. A memory device is preferably mounted to the housing for storing history and other information about the substrates within the housing. The host computer directs the control circuitry to retrieve the substrate information from the memory and relay the information to the host computer. During or after processing of the substrates, the host computer updates the memory as desired. In this manner, the host computer controls and tracks one or more docking units and associated substrate housings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.