Monolithic micromechanical tuning fork angular rate sensor
US5796001A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 7, 1995 |
| Grant date | Aug 18, 1998 |
| Priority date | — |
| Expiry date | Jun 7, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0831
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A monolithic, micromechanical tuning fork gyroscope is fabricated from a unitary silicon substrate utilizing etch stop diffusions and selective anisotropic etching. A non-etched silicon structure is suspended over the selectively etched pit. The non-etched silicon structure includes at least first and second vibratable structures. Each vibratable structure is energizable to vibrate laterally along an axis normal to the rotation sensitive axis. The lateral vibration of the first and second vibratable structures effects simultaneous vertical movement of at least a portion of the non-etched silicon structure upon the occurrence of angular rotation of the gyroscope about the rotation sensitive axis. The vertical movement of the non-etched silicon structure is sensed, and a voltage proportional to the movement is generated, for providing an indication of angular rate of rotation detected by the gyroscope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.