Gas discharge lamps and lasers fabricated by michromachining
US5796209A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 27, 1994 |
| Grant date | Aug 18, 1998 |
| Priority date | — |
| Expiry date | Oct 27, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/0973
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A high pressure gas discharge lamp and the method of making same utilizing integrated circuit fabrication techniques. The lamp is manufactured from heat and pressure resistant planar substrates in which cavities are etched, by integrated circuit manufacturing techniques, so as to provide a cavity forming the gas discharge tube. Electrodes are deposited in the cavity. The cavity is filled with gas discharge materials such as mercury vapor, sodium vapor or metal halide. The substrates are bonded together and channels may be etched in the substrate so as to provide a means for connection to the electrodes. Electrodeless RF activated lamps may also be fabricated by this technique. Micro-lasers may also be fabricated by this technique as well.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.