Overhanging separator for self-defining stacked capacitor

US5796573A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• David E. Kotecki · Hopewell Junction, US
• William H. Ma · Wappingers Falls, US

Key dates

• Filing date: May 29, 1997
• Grant date: Aug 18, 1998
• Expiry date: May 29, 2017

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10B12/03

Abstract

An overhanging separator structure with a post projecting from a surface which may be a substrate, an underlying layer on the surface, and a separator layer on the underlying layer, with the separator layer overhanging the underlying layer. A discontinuous film is then formed in a single process step having a first portion on the separator layer and a second portion on the post, the discontinuity caused by the overhanging separator layer. The structure is made into a stacked capacitor with the second (post) portion of the discontinuous film being the bottom electrode, by forming a continuous dielectric layer on the bottom electrode and a continuous top electrode layer on the dielectric layer.