Inventor · Hopewell Junction, NY, US

David E. Kotecki

60Patents
22h-index
76Co-inventors
87Inventor score

Filing activity: Apr 29, 1991 → Jun 18, 2001

Most-cited inventions

PatentTitleAreaCited byStatus
US5789320A Plating of noble metal electrodes for DRAM and FRAM Electricity 244 Expired
US5313094A Thermal dissipation of integrated circuits using diamond paths Electricity 102 Expired
US6178082A High temperature, conductive thin film diffusion barrier for ceramic/metal systems Electricity 66 Expired
US6025226A Method of forming a capacitor and a capacitor formed using the method Electricity 63 Expired
US6136664A Filling of high aspect ratio trench isolation Electricity 62 Expired
US5548470A Characterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformity Electricity 62 Expired
US5879985A Crown capacitor using a tapered etch of a damascene lower electrode Electricity 55 Expired
US6165864A Tapered electrode for stacked capacitors Electricity 51 Expired
US5825609A Compound electrode stack capacitor Electricity 44 Expired
US5633781A Isolated sidewall capacitor having a compound plate electrode Electricity 39 Expired
US5636320A Sealed chamber with heating lamps provided within transparent tubes Mechanical Engineering; Lighting; Heating 39 Expired
US6261967A Easy to remove hard mask layer for semiconductor device fabrication Electricity 38 Expired
US5585998A Isolated sidewall capacitor with dual dielectric Emerging Cross-Sectional Technologies 36 Expired
US5268069A Safe method for etching silicon dioxide Electricity 33 Expired
US5192708A Sub-layer contact technique using in situ doped amorphous silicon and solid phase recrystallization Emerging Cross-Sectional Technologies 33 Expired
US6166423A Integrated circuit having a via and a capacitor Electricity 31 Expired
US5675471A Characterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformity Electricity 30 Expired
US5266504A Low temperature emitter process for high performance bipolar devices Emerging Cross-Sectional Technologies 30 Expired
US5998250A Compound electrode stack capacitor Electricity 29 Expired
US5741363A Interiorly partitioned vapor injector for delivery of source reagent vapor mixtures for chemical vapor deposition Chemistry; Metallurgy 28 Expired
US6727174B1 Method for fabricating a dual-diameter electrical conductor Electricity 24 Expired
US5701647A Method for making an isolated sidewall capacitor having a compound plate electrode Electricity 23 Expired
US5796573A Overhanging separator for self-defining stacked capacitor Electricity 22 Expired
US6124199A Method for simultaneously forming a storage-capacitor electrode and interconnect Electricity 22 Expired
US5973351A Semiconductor device with high dielectric constant insulator material Electricity 21 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.