Ferroelectric capacitors including extended electrodes
US5801410A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 20, 1997 |
| Grant date | Sep 1, 1998 |
| Priority date | — |
| Expiry date | May 20, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/692
Abstract
A ferroelectric capacitor includes a substrate and a capacitor electrode on the substrate. A ferroelectric layer is provided on the first capacitor electrode, and a first insulating layer on the ferroelectric layer has a first contact hole therein exposing a portion of the ferroelectric layer. A second capacitor electrode on the first insulating layer makes contact with the ferroelectric layer through the first contact hole. In addition, the second capacitor electrode includes an extension that extends across the first insulating layer away from the first contact hole. A second insulating layer on the second capacitor electrode opposite the substrate has a second contact hole therein exposing a portion of the second insulating capacitor electrode extension opposite the first insulating layer. A conductive line on the second insulating layer makes contact with the exposed portion of a second capacitor electrode extension opposite the insulating layer through the second contact hole.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.