Thin-film forming apparatus
US5804046A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 1, 1994 |
| Grant date | Sep 8, 1998 |
| Priority date | — |
| Expiry date | Jul 1, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/022
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A collimator having a particle getter function, and a thin-film forming apparatus equipped with the collimator disposed between a target and a wafer. The collimator is fabricated by assembling particle getter sheets into a lattice, honeycomb, or other structure having a number of rows of openings and fixing the assembly into a frame. The particle getter sheets refers collectively to sheets and plates to be assembled integrally to provide a surface having excellent particle capturing and holding actions. Typically, the collimator is a lattice assembly of embossed, slitted particle getter sheets. The film deposited on the collimator is kept from peeling off, without deteriorating the collimator performance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.