Miniature probe positioning actuator
US5804982A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 26, 1995 |
| Grant date | Sep 8, 1998 |
| Priority date | — |
| Expiry date | May 26, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06705
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a Mini Probe Positioning Actuator which is low in cost and mass, capable of high accelerations, relatively long stroke and compact packaging. The probe positioning actuator is composed of a pair of substantially parallel cantilevered beams, each beam being comprised of flexible, signal carrying cable formed of a polyimide composition which allows for the probe tip to be suspended from and form part of the armature of the actuator. The armature also includes a pair of oppositely wound coils intermediate the beams, which coils coact electromagnetically with a pair of spaced apart but fixedly positioned (relative to the coils/armature) magnets forming a motor for effecting armature and thus probe tip movement. The light mass of the coils and armature and the dual functional purpose of the suspension beams serves to make the probe actuator highly accurate and sensitive while allowing for reliable operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.