Multiple order dispersive optics system and method of use
US5805285A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 17, 1997 |
| Grant date | Sep 8, 1998 |
| Priority date | — |
| Expiry date | Mar 17, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/2866
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a dispersive optics system, in the context of sample substrate system investigating spectroscopic reflectometer and the like systems, which, in use, produce a plurality of "Orders" of essentially single wavelength beams of light from a polychromatic beam of light. In use the availability of more than one "Order" of essentially single wavelength beams of light allows simultaneous measurement of more essentially single wavelength beams of light, over a larger range, than would be possible were only one "Order" of essentially single wavelength beams of light present. Filters are present to reduce the effects of stray light on detector elements and to allow separating the wavelengths in overlapping regions of adjacent Orders. Also disclosed is a quadrant detector means of dispersive optics alignment, and a compensator means for reducing the effect of detector element polarization state dependence.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.