Electron microscope
US5814814A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 27, 1996 |
| Grant date | Sep 29, 1998 |
| Priority date | — |
| Expiry date | Feb 27, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/248
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron microscope has an electron gun for emitting an electron beam, a specimen holder for holding a specimen thereon, and a deflection coil for applying the electron beam from the electron gun to the specimen on the specimen holder. A controller produces a differential signal representing the difference between a signal from a vibration sensor which detects vibrations of the electron gun and a signal from another vibration sensor which detects vibrations of the specimen holder. The differential signal is added to a deflection signal for the deflection coil for thereby effecting feedforward control of the electron beam to cause the electron beam to reach the specimen on the specimen holder, irrespective of the vibrations of the electron gun and the specimen holder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.