Multistation surface inspection system
US5814829A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 11, 1995 |
| Grant date | Sep 29, 1998 |
| Priority date | — |
| Expiry date | Jul 11, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/94
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection system and an inspection method, the method including detecting flaws on a surface, determining the size, count, and position of flaws on the surface, providing a representation of the detected flaws by size, count, and position on a display, setting a display threshold value which is a function of a number of particles of a particular size to be displayed on the display, determining when the display threshold is breached and in response adjusting the display to cease displaying those flaws, storing at least one inspection threshold value, and determining when the inspection threshold value is breached and in response outputting an inspection interrupt signal to stop the inspection after the inspection threshold value is breached.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.