Simplified contactless test of MCM thin film I/O nets using a plasma
US5818239A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 5, 1997 |
| Grant date | Oct 6, 1998 |
| Priority date | — |
| Expiry date | Mar 5, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/50
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gas panel plasma plate is used to detect shorts and opens on a thin film surface of a multilayer ceramic module (MCM) through biasing a circuit of the module through bottom surface module (BSM) pins to produce a glow within the plasma plate. A grounded plane is placed above the module to be tested, and the gap between the module and the plane is filled with a gas. A plasma discharge is created by biasing the circuit. The current produced at the BSM pin by the plasma discharge is monitored. The monitored current of the circuit under test is compared to a current range of a known good module. In the alternative, the light flux produced by the plasma discharge is monitored, and the monitored light flux is compared to a light flux range of a known good module.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.