Non-contact optical glide tester
US5818592A · kind A · utility
36Cited by
2References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 7, 1997 |
| Grant date | Oct 6, 1998 |
| Priority date | — |
| Expiry date | Feb 7, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/88
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A non-contact optical method and apparatus for use in inspecting and measuring defects on a disk. The apparatus generates an interference pattern from a reference beam reflected from a surface of a transparent slider with a second beam reflected from a surface of a test disk. The resulting interference pattern is processed by a set of photodetectors and processing electronics to quantify and map the location and magnitude of asperities on the disk.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.