Compact excimer laser insulator with integral pre-ionizer
US5818865A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 16, 1997 |
| Grant date | Oct 6, 1998 |
| Priority date | — |
| Expiry date | May 16, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/0384
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A pre-ionizing system in which the pre-ionizer elements are integral with the cathode insulating plate is provided. The cathode insulating plate includes a recessed region machined into the front surface into which the cathode fits, lying substantially flush with the insulator front surface. The back surface of the insulating plate contains a pair of slots running parallel to the long axis of the cathode. The pre-ionizing rods are located within these slots, the slots having sufficient depth to locate the rods approximately adjacent to the cathode. By maintaining the rods at ground, a capacitor is formed in which the insulating plate material between the rod and the cathode acts as the dielectric material of the capacitor. When a voltage pulse is applied, a capacitive corona discharge is formed which pre-ionizes the gases in the region near the cathode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.