Scanning electron microscopic ruler and method
US5822875A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 2, 1997 |
| Grant date | Oct 20, 1998 |
| Priority date | — |
| Expiry date | Jun 2, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2816
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A set of ruled devices and method for measuring an actual dimension of a specimen displayed as a magnified image by a magnification system such as a scanning electron microscope having a plurality of selected magnification factors. The magnified image includes dimensions that correspond to a predetermined selected magnification. A set of ruled devices is provided, whereby each ruled device includes indicia that corresponds to one of the magnification factors. A ruled device that corresponds to the predetermined selected magnification is selected. The dimension of the image is measured with the selected ruled device, whereby the indicia of the selected ruled device indicates the actual dimension of the specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.