Inventor · Dresden, DE

Klaus Feldner

8Patents
4h-index
15Co-inventors
54Inventor score

Filing activity: Oct 4, 1996 → Mar 23, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US6300235A Method of forming multi-level coplanar metal/insulator films using dual damascene with sacrificial flowable oxide Electricity 36 Expired
US5840625A Method of fabricating integrated circuit interconnection employing tungsten/aluminum layers Electricity 34 Expired
US6016008A Integrated circuit interconnection employing tungsten/aluminum layers Electricity 11 Expired
US5822875A Scanning electron microscopic ruler and method Electricity 10 Expired
US6638814B1 Method for producing an insulation Electricity 3 Expired
US6753236B2 Method for planarizing an isolating layer Electricity 2 Expired
US7008849B2 Method for providing bitline contacts in a memory cell array and a memory cell array having bitline contacts Electricity 0 Expired
US11198932B2 Method for producing a sliding surface Mechanical Engineering; Lighting; Heating 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.