Method and apparatus for reflowing and annealing borophosphosilicate glass
US5828036A · kind A · utility
2Cited by
10References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 7, 1995 |
| Grant date | Oct 27, 1998 |
| Priority date | — |
| Expiry date | Jul 7, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/935
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A furnace with a large quartz tube with a gas inlet on one end, and a large opening at the other end for introducing and withdrawn wafers on a support. At least one small quartz tube is provided within and adjacent the sidewall of the large tube that has a gas inlet on one end outside of the large tube, and apertures in the sidewall. In use, a major stream of gas is provided by a gas inlet on the large tube that flows longitudinally through the large tube. A series of secondary streams of gas are provided from the apertures in the small tube that flow perpendicular to the major stream and across the surfaces of the wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.