Platen for use with lithographic stages and method of making same
US5828142A · kind A · utility
27Cited by
33References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 22, 1997 |
| Grant date | Oct 27, 1998 |
| Priority date | — |
| Expiry date | Aug 22, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49009
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A lithographic stage is carried by a platen formed of a plurality of tiles containing a uniformly spaced grid of teeth and having low reluctance and high resistivity. The teeth have been formed by powder metal technology using as powder particles of a ferromagnetic material, the particles being of high resistivity or coated with an insulating material. The space between the teeth is filled with non-magnetic material, such as epoxy, and the entire platen finished such that it has a smooth and uniform flat upper surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.