MRS Technology, Inc.
🏢 View company profile →8Patents
0Active
8Granted
32Portfolio score
Filing activity: Oct 22, 1987 → Aug 22, 1997
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4769680A | Apparatus and method for making large area electronic devices, such as flat panel displays and the like, using correlated, aligned dual optical systems | Physics | 107 | Expired |
| US5677758A | Lithography System using dual substrate stages | Emerging Cross-Sectional Technologies | 99 | Expired |
| USRE33836E | Apparatus and method for making large area electronic devices, such as flat panel displays and the like, using correlated, aligned dual optical systems | General | 86 | Expired |
| US5828142A | Platen for use with lithographic stages and method of making same | Emerging Cross-Sectional Technologies | 27 | Expired |
| US5991004A | Lens focus shift sensor | Physics | 18 | Expired |
| US5739913A | Non-contact edge detector | Performing Operations; Transporting | 13 | Expired |
| US4855792A | Optical alignment system for use in photolithography and having reduced reflectance errors | Physics | 13 | Expired |
| US5483345A | Alignment system for use in lithography utilizing a spherical reflector having a centered etched-on projection object | Physics | 12 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.