Patent · US Expired

CaTiO.sub.3 Interfacial template structure on semiconductor-based material and the growth of electroceramic thin-films in the perovskite class

US5830270A · kind A · utility

138Cited by
9References
33Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 5, 1996
Grant dateNov 3, 1998
Priority date
Expiry dateAug 5, 2016

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D1/684
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A structure including a film of a desired perovskite oxide which overlies and is fully commensurate with the material surface of a semiconductor-based substrate and an associated process for constructing the structure involves the build up of an interfacial template film of perovskite between the material surface and the desired perovskite film. The lattice parameters of the material surface and the perovskite of the template film are taken into account so that during the growth of the perovskite template film upon the material surface, the orientation of the perovskite of the template is rotated 45.degree. with respect to the orientation of the underlying material surface and thereby effects a transition in the lattice structure from fcc (of the semiconductor-based material) to the simple cubic lattice structure of perovskite while the fully commensurate periodicity between the perovskite template film and the underlying material surface is maintained. The film-growth techniques of the invention can be used to fabricate solid state electrical components wherein a perovskite film is built up upon a semiconductor-based material and the perovskite film is adapted to exhibit ferroelec…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.