Probe card array check plate with transition zones
US5831443A · kind A · utility
5Cited by
7References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 5, 1996 |
| Grant date | Nov 3, 1998 |
| Priority date | — |
| Expiry date | Jun 5, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07342
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe card array check plate is provided with transition zones to prevent a semi-conductor probe from impacting an epoxy joint in the check plate during an over travel test. The transition zone is in the form of beveled edges or tapers between first and second testing surfaces. In alternate embodiments, two or more different types of testing surfaces are juxta positioned, or an optical measurement window is made sufficiently large to prevent an over traveling probe tip from entering an epoxied area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.