Method for controlling apparatus for supplying steam for ashing process
US5832177A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Apr 21, 1995 |
| Grant date | Nov 3, 1998 |
| Priority date | — |
| Expiry date | Apr 21, 2015 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4485
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for controlling an apparatus for supplying steam to an ashing process. The apparatus includes a closed water-containing vessel formed from a material having good heat conductive characteristics for evaporating water to provide steam to a vacuum chamber housing an ongoing ashing process. In accordance with the procedure, steam evaporated in a closed steam supply tank is introduced into a vacuum chamber via a pressure reducing mass-flow controller. The temperature of the water in the supply tank, the temperature of the steam in the pipes leading from the supply tank to the mass-flow controller, the temperature of the steam in the pipes from the mass-flow controller to the vacuum chamber and the temperature of the steam in the mass-flow controller itself are all independently controlled such that the temperature in the water tank is equal to or less than the temperature in the pipes leading to and from the mass-flow controller and the temperature in the pipes is less than or equal to the temperature in the mass-flow controller.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.