Patent · US Expired

Crosslinked polymers

US5834531A · kind A · utility

4Cited by

1References

16Claims

0Family size

Assignee

Olin Microelectronic Chemicals, Inc. · US

Inventors

Hans-Thomas Schacht · Rheinfelden (Baden), DE
Norbert Muenzel · Heitersheim, DE
Carl-Lorenz Mertesdorf · Wetzikon, CH
Pasquale Alfred Falcigno · Yonkers, US
Heinz Holzwarth · Bad Krozingen, DE
Ottmar Rohde · Basel, CH
Hans-Jorg Kirner · Pratteln, CH

Key dates

Filing date	Oct 29, 1997
Grant date	Nov 10, 1998
Priority date	—
Expiry date	Oct 29, 2017

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC08F2810/20
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Radiation-sensitive compositions comprising a substance which forms acid under the action of actinic radiation and polymers based on combination of different repeating units derived from hydroxy styrene and hydroxy-vinylcyclohexane derivatives wherein a portion of the hydroxyl groups are replaced with either acid-labile acetal or ketal protecting groups and where a portion of the repeating groups comprise two crosslinked species connected via the protecting groups.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.