Inventor · Heitersheim, DE

Norbert Muenzel

7Patents
5h-index
10Co-inventors
49Inventor score

Filing activity: Dec 14, 1995 → May 19, 1999

Most-cited inventions

PatentTitleAreaCited byStatus
US5928818A Photoresist compositions Emerging Cross-Sectional Technologies 25 Expired
US5849808A Organic solvent soluble photoresists which are developable in aqueous alkaline solutions Physics 19 Expired
US5714559A Crosslinked polymers Chemistry; Metallurgy 16 Expired
US5776657A Wet-chemical developable, etch-stable photoresist for UV radiation with a wavelength below 200 NM Physics 9 Expired
US6124405A Polymers for photoresist compositions Emerging Cross-Sectional Technologies 6 Expired
US6063549A Wet-chemical, developable, etch-stable photoresist for UV radiation with a wavelength below 200 nm Physics 5 Expired
US5834531A Crosslinked polymers Chemistry; Metallurgy 4 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.