Scanning electron microscope
US5834774A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 24, 1997 |
| Grant date | Nov 10, 1998 |
| Priority date | — |
| Expiry date | Jul 24, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2485
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
There is disclosed a scanning electron microscope for producing images at different magnifications in such a way that these images can be easily compared. This microscope has a control unit that is set at two magnifications. These two magnifications are stored in their respective magnification memories. A first frame used for a comparison of the magnifications is displayed in a size F.sub.1 on a first CRT. A second frame used for a comparison of the magnifications is displayed in a size F.sub.2 on a second CRT. A magnification comparator finds these sizes F.sub.1 and F.sub.2 from the two magnifications and from the sizes of the viewing screens of the two CRTs. Signals indicating the sizes F.sub.1 and F.sub.2 are supplied to a magnification comparison frame display device, which produces frame signals to adders, where the frame signals are superimposed on the image signals. A frame indicating the scope of the image displayed on the second CRT is displayed on the first CRT. A frame indicating the scope of the image displayed on the first CRT is displayed on the second CRT.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.