Method and apparatus for determining performance characteristics in lithographic tools
US5835227A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 14, 1997 |
| Grant date | Nov 10, 1998 |
| Priority date | — |
| Expiry date | Mar 14, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/706
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method and apparatus for determining performance characteristics in lithographic tools includes projecting a predetermined image with a projection system having a known predetermined performance characteristic to obtain data indicative of the relationship between the size of the projected image and the predetermined performance characteristic. The same image is then projected in a system having an unknown value for the predetermined performance characteristic. The predetermined performance characteristic for the system under consideration is then determined based on the data obtained when the image was projected in the system having the known predetermined performance characteristic.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.