Reflective spatial light modulator with encapsulated micro-mechanical elements
US5835256A · kind A · utility
385Cited by
6References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 18, 1996 |
| Grant date | Nov 10, 1998 |
| Priority date | — |
| Expiry date | Jun 18, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A spatial light modulator, comprised of an upper and a lower substrate. One or more electrostatically deflectable mirrors are suspended by torsion hinges from an optically transmissive upper substrate. The upper substrate is held above the lower substrate containing electronic circuitry. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. An aperture layer is built into the upper substrate to enable light to reach only the flat mirror surfaces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.