Patent assignee · US · COMPANY

Reflectivity, Inc.

94Patents
0Active
94Granted
40Portfolio score

Filing activity: Jun 18, 1996 → Aug 30, 2005

Most-cited patents

PatentTitleAreaCited byStatus
US5835256A Reflective spatial light modulator with encapsulated micro-mechanical elements Physics 385 Expired
US6046840A Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements Emerging Cross-Sectional Technologies 379 Expired
US6356378B1 Double substrate reflective spatial light modulator Emerging Cross-Sectional Technologies 278 Expired
US6172797A Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements Emerging Cross-Sectional Technologies 206 Expired
US6844959B2 Spatial light modulators with light absorbing areas Emerging Cross-Sectional Technologies 179 Expired
US6947200B2 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements Emerging Cross-Sectional Technologies 176 Expired
US6388661B1 Monochrome and color digital display systems and methods Physics 136 Expired
US6337760B1 Encapsulated multi-directional light beam steering device Physics 126 Expired
US6523961B2 Projection system and mirror elements for improved contrast ratio in spatial light modulators Performing Operations; Transporting 108 Expired
US7009754B2 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements Emerging Cross-Sectional Technologies 107 Expired
US7002726B2 Micromirror having reduced space between hinge and mirror plate of the micromirror Physics 104 Expired
US6969635B2 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates Electricity 100 Expired
US6906847B2 Spatial light modulators with light blocking/absorbing areas Electricity 96 Expired
US6960305B2 Methods for forming and releasing microelectromechanical structures Electricity 96 Expired
US6849471B2 Barrier layers for microelectromechanical systems Performing Operations; Transporting 93 Expired
US6913942B2 Sacrificial layers for use in fabrications of microelectromechanical devices Performing Operations; Transporting 90 Expired
US6290864A Fluoride gas etching of silicon with improved selectivity Electricity 90 Expired
US7042623B1 Light blocking layers in MEMS packages Physics 84 Expired
US6396619B1 Deflectable spatial light modulator having stopping mechanisms Physics 78 Expired
US6974713B2 Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields Physics 78 Expired
US6529310B1 Deflectable spatial light modulator having superimposed hinge and deflectable element Physics 73 Expired
US6900072B2 Method for making a micromechanical device by using a sacrificial substrate Electricity 71 Expired
US6962419B2 Micromirror elements, package for the micromirror elements, and projection system therefor Electricity 58 Expired
US6741383B2 Deflectable micromirrors with stopping mechanisms Physics 55 Expired
US7041224B2 Method for vapor phase etching of silicon Performing Operations; Transporting 50 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.