Patent · US Expired

Method and apparatus for improved temperature control in rapid thermal processing (RTP) systems

US5841110A · kind A · utility

45Cited by

6References

11Claims

0Family size

Assignee

Steag AST · DE

Inventors

Zsolt Nenyei · Blaustein, DE
Heinrich Walk · Allmendingen, DE
Michael Maurer · Uerdingen, DE
Thomas Knarr · Langenau, DE

Key dates

Filing date	Aug 27, 1997
Grant date	Nov 24, 1998
Priority date	—
Expiry date	Aug 27, 2017

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB23K2101/40
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

A method for Rapid Thermal Processing (RTP) is presented, wherein the broadband reflectivity of an object is measured, and the results of the measurement used by the RTP system to adjust the RTP system parameters used in processing the object.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.