Steag AST
6Patents
0Active
6Granted
28Portfolio score
Filing activity: Jan 8, 1997 → Feb 16, 2001
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5841110A | Method and apparatus for improved temperature control in rapid thermal processing (RTP) systems | Performing Operations; Transporting | 45 | Expired |
| US5965047A | Rapid thermal processing (RTP) system with rotating substrate | Electricity | 29 | Expired |
| US5872889A | Apparatus and method for rapid thermal processing | Physics | 26 | Expired |
| US6369363B2 | Method of measuring electromagnetic radiation | Physics | 20 | Expired |
| US5870526A | Inflatable elastomeric element for rapid thermal processing (RTP) system | Electricity | 14 | Expired |
| US6462315B2 | Optical radiation measurement apparatus | Physics | 8 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.