Method and apparatus for modeling process control
US5841660A · kind A · utility
24Cited by
5References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 20, 1996 |
| Grant date | Nov 24, 1998 |
| Priority date | — |
| Expiry date | Feb 20, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for process control which uses discrete lots in which each lot is uniquely identified. The process is modeled with a precedence rule which allows concurrent processing of each discrete lot. Lots are processed simultaneously within different processing steps in such a way as to maintain the unity of the lot while tracking the lot at all times during processing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.