Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device
US5844666A · kind A · utility
29Cited by
6References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 2, 1996 |
| Grant date | Dec 1, 1998 |
| Priority date | — |
| Expiry date | May 2, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/709
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A positioning device with a drive unit with which an object table is displaceable over a guide which is fastened to a first frame thereof. A stationary part of the drive unit is fastened to a second frame thereof and dynamically isolated from the first frame while a reaction force of the object table arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.