Jan Van Eijk
38Patents
11h-index
93Co-inventors
78Inventor score
Filing activity: Sep 22, 1986 → Sep 20, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4778275A | Method of aligning a mask and a substrate relative to each other and arrangement for carrying out the method | Physics | 96 | Expired |
| US5172160A | Optical lithographic device having a machine frame with force compensation | Physics | 92 | Expired |
| US7948122B2 | Displacement device | Emerging Cross-Sectional Technologies | 48 | Active |
| US5243491A | Electromagnetic support with current-independent characteristics | Mechanical Engineering; Lighting; Heating | 43 | Expired |
| US5204712A | Support device with a tiltable object table, and optical lithographic device provided with such a support device | Electricity | 34 | Expired |
| US5953105A | Positioning device with a reference frame for a measuring system, and a lithographic device provided with such a positioning device | Physics | 30 | Expired |
| US5844666A | Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device | Physics | 29 | Expired |
| US5767948A | Lithographic device with a three-dimensionally positionable mask holder | Physics | 27 | Expired |
| US5844664A | Positioning device with a force actuator system for compensating center-of-gravity displacements, and lithographic device provided with such a positioning device | Physics | 18 | Expired |
| US6717296B2 | Lithographic apparatus and motor for use in the apparatus | Emerging Cross-Sectional Technologies | 12 | Expired |
| US5301013A | Positioning device having two manipulators operating in parallel, and optical lithographic device provided with such a positioning device | Electricity | 11 | Expired |
| US5264982A | Electromagnetic support with unilateral control currents | Mechanical Engineering; Lighting; Heating | 10 | Expired |
| US4746800A | Positioning device comprising a z-manipulator and a .theta.-manipulator | Performing Operations; Transporting | 8 | Expired |
| US7375479B2 | Apparatus for processing an object with high position accurancy | Electricity | 7 | Expired |
| US8059261B2 | Masking device, lithographic apparatus, and device manufacturing method | Physics | 7 | Active |
| US7902494B2 | System for detecting motion of a body | Physics | 7 | Active |
| US8482719B2 | Positioning system, lithographic apparatus and method | Physics | 6 | Active |
| US6943464B2 | Lithographic apparatus and motor for use in the apparatus | Emerging Cross-Sectional Technologies | 5 | Expired |
| US6251444A | Dough product and method for improving bread quality | Human Necessities | 4 | Expired |
| US7248339B2 | Lithographic apparatus and device manufacturing method | Physics | 4 | Expired |
| US9192271B2 | Suction unit and autonomous vacuum cleaner | Human Necessities | 3 | Active |
| US7423730B2 | Lithographic apparatus | Physics | 3 | Expired |
| US9110387B2 | Lithographic apparatus comprising a substrate table and a surface substrate actuator | Physics | 3 | Active |
| US8896811B2 | Positioning system and a method for positioning a substage with respect to a frame | Physics | 2 | Active |
| US9329501B2 | Lithographic apparatus, method of deforming a substrate table and device manufacturing method | Physics | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.