Wafer holder with spindle assembly and wafer holder actuator
US5851041A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 26, 1996 |
| Grant date | Dec 22, 1998 |
| Priority date | — |
| Expiry date | Jun 26, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An improved wafer holder with spindle assembly and wafer holder actuator is disclosed. In one embodiment, the vertical motion of a shaft drives an arm positioning member in a rotational motion. The arm positioning member is coupled to a first position of an arm such that the arm moves in a horizontal motion when the arm positioning member rotates. A substrate holding member is coupled to the arm at a second position, such that the horizontal motion of the arm moves the substrate holding member between an open and a closed position. The shaft of the above described embodiment is moved in a vertical motion by an actuator. A first cylinder of the actuator expands and engages a spring which moves the shaft upward and a second cylinder of the actuator retracts to disengage the first cylinder thereby moving the shaft downward.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.