Substrates coated with an antihalation layer that contains a resin binder comprising anthracene units
US5851730A · kind A · utility
49Cited by
12References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 26, 1997 |
| Grant date | Dec 22, 1998 |
| Priority date | — |
| Expiry date | Nov 26, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/38
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.