Aligner for a substrate carrier
US5853214A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 27, 1995 |
| Grant date | Dec 29, 1998 |
| Priority date | — |
| Expiry date | Nov 27, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6734
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate aligner for a substrate carrier or cassette including an engagement assembly for moving and maintaining one or more substrates into an aligned position when closed, and an actuator assembly for opening and closing the engagement assembly. In one embodiment, the engagement assembly includes front and back engagement assemblies for mounting at opposite corners of the housing to thereby interface opposite comers of the substrates. Each engagement assembly preferably includes a roller for interfacing a corresponding edge of each the substrates, where the front assembly includes two rollers for interfacing front edges and adjacent side edges, and the back engagement assembly includes two rollers for interfacing the back edges and the opposite side edges of the substrates. In this manner, the engagement assembly interfaces all four edges of each substrate to thereby manipulate and maintain the substrates into a substantially aligned position when closed. The rollers preferably rotate to avoid scraping of the substrate edges which might otherwise generate contaminating particulate. Furthermore, the rollers have compliant outer surfaces to dampen potentially damaging forces. Th…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.