Filament for ion implanter plasma shower
US5856674A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Sep 16, 1997 |
| Grant date | Jan 5, 1999 |
| Priority date | — |
| Expiry date | Sep 16, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31701
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A ribbon filament (86) is provided for a thermionic emission device. The filament comprises an elongated body having a configuration defined by a length, a width, and a thickness. The length comprises a central portion (96) and first and second end portions (98) on either side of the central portion. The width of the central portion is greater than that of the first and second end portions. In addition, the thickness of the filament is substantially less than the width along its entire length. The ribbon filament (86) may be configured as a single helical coil having its first and second end portions (98) mounted to first and second legs (85), respectively, at locations of slots therein. Preferably, the filament (86) is comprised of tungsten and the first and second legs (85) are also comprised of tungsten.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.