Positioning system and method and apparatus for device manufacture
US5858587A · kind A · utility
57Cited by
9References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 16, 1996 |
| Grant date | Jan 12, 1999 |
| Priority date | — |
| Expiry date | Feb 16, 2016 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16C2370/20
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A positioning system wherein a holding surface for holding a substrate is movable relative to a base in directions of X, Y and Z axes and in rotational directions about the X, Y and Z axes, wherein there are plural guiding devices associated respectively with motions in the directions of X, Y and Z axes and in the rotational directions about the X, Y and Z axes, respectively, and wherein each guiding device comprises a non-contact static bearing device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.