Patent · US Expired

Image formation utilizing photosensitive compositions containing low metal content p-cresol oligomers

US5858627A · kind A · utility

2Cited by
31References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 29, 1997
Grant dateJan 12, 1999
Priority date
Expiry dateAug 29, 2017

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/0236
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Process for producing a photosensitizer comprising a diazo ester of a p-cresol oligomer where at least one of the hydroxy groups on the p-cresol ring has been esterified with diazo-sulfonyl chloride comprising from about 60 to 100 mole % 2,1,4 or 2,1,5-diazo sulfonyl chloride, or a mixture thereof; and a photoresist comprising an admixture of the photosensitizer, which is present in the photoresist composition in an amount sufficient to uniformly photosensitive the photoresist composition, a water insoluble, aqueous alkali soluble novolak resin, the novolak resin being present in the photoresist composition in an amount sufficient to form a substantially uniform photoresist composition, and a suitable solvent.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.