Metal ion plasma generator having rotatable anode plate
US5859500A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Aug 8, 1997 |
| Grant date | Jan 12, 1999 |
| Priority date | — |
| Expiry date | Aug 8, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32055
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In an apparatus in which a vacuum-arc discharge is generated between a metal cathode and anode plate and an evaporated substance from the cathode is supplied through openings on the anode plate, conventionally, a cleaning work to remove metal films deposited on the edges of the openings has to be done periodically, which limits continuous operation. The apparatus relating to the invention is provided with a rotary anode plate 14 on which a plurality of openings 17 are formed on a circumference concentric with the rotary axis of the anode plate. As the anode plate 14 rotates, the openings 17 are designed to come into a position to face the cathode. This construction can continue a longer operation with an extremely low deterioration of the performance without a maintenance work requiring a relief of the vacuum.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.