Jun Munemasa
7Patents
4h-index
24Co-inventors
57Inventor score
Filing activity: May 28, 1992 → Jun 15, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5269896A | Cathodic arc deposition system | Chemistry; Metallurgy | 25 | Expired |
| US7384484B2 | Substrate processing method, substrate processing apparatus and substrate processing system | Emerging Cross-Sectional Technologies | 10 | Expired |
| US5896012A | Metal ion plasma generator having magnetic field forming device located such that a triggering is between the magnetic field forming device and an anode | Electricity | 8 | Expired |
| US5404017A | Ion implantation apparatus | Electricity | 7 | Expired |
| US5859500A | Metal ion plasma generator having rotatable anode plate | Electricity | 2 | Expired |
| US7335596B2 | Method for fabricating copper-based interconnections for semiconductor device | Electricity | 1 | Expired |
| US9273387B2 | Member covered with hard coating | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.