Device for surface coating or lacquering of substrates

US5863328A · kind A · utility

Assignee

• SINGULUS TECHNOLOGIES AG · DE

Inventors

• Eggo Sichmann · Gelnhausen, DE
• Reinhard Gerigk · Gelnhausen, DE

Key dates

• Filing date: Feb 18, 1997
• Grant date: Jan 26, 1999
• Expiry date: Feb 18, 2017

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/162
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Apparatus for surface coating or for lacquering of a substrate, such as a disk-shaped substrate 2, which can be placed on a substrate support 14 and can be driven or made to perform a rotating movement, wherein the medium to be applied or the lacquer fluid is applied to the substrate 2 via a feed device 6 which can be displaced in relation to the substrate 2 and/or can be driven. The substrate 2 or the substrate support 14 can be displaced by means of a guide device or in a connecting link guide 7 in such a way that in the area of the substrate 2 the feed device 6 for applying the fluid or the lacquer is conducted approximately parallel with the surface of the substrate 2 and can be stopped at any arbitrary point above the substrate 2 at an even height distance.