Encapsulated fastener
US5871321A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 14, 1997 |
| Grant date | Feb 16, 1999 |
| Priority date | — |
| Expiry date | Jul 14, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S411/914
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An improved, process compatible fastener is especially useful for securing a member, such as a wafer clamp ring, to an assembly for use in a process environment. The fastener is of a simple design, such that it is readily manufactured, and such that it is not a source of contamination. In particular, an integrated fastener includes both a metal fastener and a cone shaped metal lock washer within a single fastener assembly, such that a single fastener is used for accomplish the function of a screw and a washer. All surfaces of the fastener that are exposed within the process environment are encapsulated in a process compatible material. In this way, the fastener may be secured in the process environment in a single operation without leaving any gaps or partially exposed surfaces that may introduce contaminants into the process environment, such that the integrated fastener also provides the function of a process compatible cap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.