Integrated circuit having integral decoupling capacitor
US5872697A · kind A · utility
33Cited by
12References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 13, 1996 |
| Grant date | Feb 16, 1999 |
| Priority date | — |
| Expiry date | Feb 13, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention is a decoupling capacitor for an integrated circuit. The integrated circuit has a final metal layer which includes a power bus. The decoupling capacitor includes a dielectric film disposed over the final metal layer and a conductive film disposed over the dielectric layer, whereby capacitance may be provided in the dielectric layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.