Device for gripping and holding substrates

US5876082A · kind A · utility

Assignee

• SINGULUS TECHNOLOGIES AG · DE

Inventors

• Stefan Kempf · Alzenau, DE
• Michael Reising · Mömbris, DE

Key dates

• Filing date: Feb 18, 1997
• Grant date: Mar 2, 1999
• Expiry date: Feb 18, 2017

Classification

• Technology area (CPC G): Physics
• CPC primary: G11B17/02
• WIPO field: Audio-visual technology
• WIPO sector: Electrical engineering

Abstract

A device 1 for gripping and holding substrates 2 with one or several substrate holders 5 arranged in a vacuum chamber 4, 4', 4" and one or several displaceably arranged grippers 3, which can be displaced into a first position through the action of an operating pressure or against the action of a spring 6, and into a second position through the action of a diaphragm 7, which can be exposed to a pneumatic pressure P.sub.a and/or to an operating element 8 cooperating with it, wherein the substrate 2 is held when the diaphragm is in a first position and the substrate 2 is released for being further transported when the diaphragm is in a second position. The diaphragm 7 is integrated into the vacuum chamber in such a way that in an operating position it is exposed to atmospheric pressure P.sub.a on the one side 9 and on the other side 10 to vacuum pressure P.sub.v, and in a second position is exposed to vacuum pressure P.sub.v on both sides.