Substrate transporting apparatus
US5879121A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Feb 18, 1997 |
| Grant date | Mar 9, 1999 |
| Priority date | — |
| Expiry date | Feb 18, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/121
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus for transporting substrates between a first device and at least one second device for gripping and holding substrates with a substrate holder disposed in a vacuum chamber. The first device for gripping and holding substrates is equipped with one or more movable grippers which are movable by a mechanical and/or electromechanical or magnetically operating displacement device into a position that holds or releases the substrate, and the second device for gripping and holding substrates is equipped with one or more movable grippers which are movable counter to the action of a control pressure or of a spring, into a first position and, via the action of a diaphragm that can be subjected to a pneumatic pressure and/or a vacuum pressure and an adjusting part cooperating with the diaphragm, into a second position, wherein in the one position the substrate is held and in the second position the substrate is released for further transport, and in the position of the two devices for transfer of the substrate two substrate receiving parts can be aligned and fixed coaxially with one another.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.