Patent · US Expired

Transport and transfer apparatus

US5882171A · kind A · utility

8Cited by
11References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 10, 1996
Grant dateMar 16, 1999
Priority date
Expiry dateOct 10, 2016

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/53065
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A transport and transfer arrangement for a workpiece in a vacuum treatment apparatus has a first transport member with at least one first workpiece holder and a second transport member with at least one second workpiece holder. The first and second transport members are movable relative to each other and in a position in which said one first and said one second workpiece holders are in a spaced face-to-face position. At least one transfer armature member is made of magnetic material. The first and second workpiece holders are part of controllable magnetic arrangement which generates in the spaced face-to-face position and between the workpiece holders, a magnetic force controllable to act in either direction and magnetically driving said transfer armature member controllably in a first direction from the first workpiece holder towards and onto said second workpiece holder and vice versa in a second direction as the workpiece holders are face to face. The transfer armature member is releasably firmly attachable to the workpiece with respect to the first and second directions so as to convey the workpiece both in the first and in said second direction, respectively from said first wo…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.