Jig for use in CVD and method of manufacturing jig for use in CVD
US5882418A · kind A · utility
4Cited by
6References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 4, 1997 |
| Grant date | Mar 16, 1999 |
| Priority date | — |
| Expiry date | Aug 4, 2017 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4581
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
It is an object to improve the corrosion resistance of a CVD jig made of quartz to prevent exfoliation of a film attached on the surface to prevent dust. The surface of a quartz CVD jig is burned with an arc plasma torch 14 so that the OH concentration in the quartz surface remains under 30 ppm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.