Magnetically-positioned X-Y stage having six-degrees of freedom
US5886432A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Apr 28, 1997 |
| Grant date | Mar 23, 1999 |
| Priority date | — |
| Expiry date | Apr 28, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/135
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The respective square cross-section permanent magnets of each of a plurality of spaced Halbach magnet arrays, attached to the bottom of movable X-Y stage and aligned with a given one of the X and Y axes, are spaced from one another parallel to the other one of the X and Y axes of by the width of the square cross-section cooperates with both a first set of a plurality of flat stationary electromagnet coils of wire and a second set of a plurality of flat stationary electromagnet coils of wire that substantially lie in proximate horizontal X, Y planes and, respectively, are angularly offset by +45.degree. and -45.degree. with respect to the given one of the X and Y horizontal axes to provide a lateral translational force on the stage with respect to the horizontal X and/or Y axes and/or a levitating translational force on the stage with respect to the vertical Z axis. First, second and third pairs of spaced electromagnets attached to the bottom of movable X-Y stage and situated in spaces between adjacent Halbach magnet arrays cooperate with both the first and second sets electromagnet coils of wire to create couples that can tilt the stage about the X and/or Y axes and/or yaw the stag…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.